Cross section of a resist coated V-groove (bottom) by using spray coating method.
Cross section of a resist coated
90°- trench by using spray coating method.
90°- trench by using spray coating method.
Our revolutionary spray coating method, using an OPTIcoat ST22i from ATMsse GmbH for standard and special coating processes results in
- • uniform coatings over high topography by using standard resists
- • homogeneous protection coatings on samples with high topography
In combination with the projection alignment method structures at the bottom of deep grooves (max. depth 450 µm) with a resolution down to 5 µm can be realized.
Resist structure at the bottom of a V-groove (depth ~280 µm).